ALD/ALE 2024 ALD Fundamentals Sessions
Click a Session Code to view its Abstracts
Topic Abstract Book
(1MB, May 13, 2024)
Topics
| Time Periods
| Schedule Overview
| Session Code | Start | Session Name | Room |
|---|---|---|---|
| AF-MoA | Monday, August 5, 2024 4:00 PM | Precursors and Chemistry: Precursor Design, New Precursors, Process Development I | Hall 3A |
| AF-MoP | Monday, August 5, 2024 5:45 PM | ALD Fundamentals Poster Session | Hall 3 |
| AF1-TuM | Tuesday, August 6, 2024 8:00 AM | Precursors and Chemistry: Precursor Design, New Precursors, Process Development II | Hall 3A |
| AF2-TuM | Tuesday, August 6, 2024 10:45 AM | Growth and Characterization: Plasma Enhanced ALD I | Hall 3A |
| AF1-TuA | Tuesday, August 6, 2024 1:30 PM | Precursors and Chemistry: Precursor Design, New Precursors, Process Development III | Hall 3A |
| AF2-TuA | Tuesday, August 6, 2024 4:00 PM | Precursors and Chemistry: Simulation, Modeling, and Machine Learning for ALD | Hall 3A |
| AF1-WeM | Wednesday, August 7, 2024 8:00 AM | Growth and Characterization: High Aspect Ratio/High Surface Area/Powder ALD and Characterization of ALD Films | Hall 3A |
| AF2-WeM | Wednesday, August 7, 2024 10:45 AM | Growth and Characterization: Low Temperature ALD | Hall 3A |
| AF1-WeA | Wednesday, August 7, 2024 1:30 PM | Growth and Characterization: In-situ and in-vacuo Analysis, Surface Science of ALD I | Hall 3A |
| AF2-WeA | Wednesday, August 7, 2024 4:00 PM | Growth and Characterization: In-situ and in-vacuo Analysis, Surface Science of ALD II | Hall 3A |
| AF3-WeA | Wednesday, August 7, 2024 4:00 PM | Growth and Characterization: Plasma Enhanced ALD II | Hall 3F |