AVS 69 Atomic Scale Processing Mini-Symposium Sessions
Click a Session Code to view its Abstracts
Topic Abstract Book
(618KB, Nov 2, 2023)
Topics
| Time Periods
| Schedule Overview
| Session Code | Start | Session Name |
|---|---|---|
| AP+PS+TF-MoM | Monday, November 6, 2023 8:20 AM | Thermal Atomic Layer Etching and Deposition |
| AP+PS-MoA | Monday, November 6, 2023 1:40 PM | Plasma Enhanced Atomic Layer Etching |
| AP+EM+PS+TF-TuM | Tuesday, November 7, 2023 8:00 AM | Area Selective Processing and Patterning |
| AP1+2D+EM+PS+TF-TuA | Tuesday, November 7, 2023 2:20 PM | Atomic Layer Processing: Integration of Deposition and Etching |
| AP2+PS+TF-TuA | Tuesday, November 7, 2023 5:00 PM | Energy Enhanced ALD |
| AP-TuP | Tuesday, November 7, 2023 6:30 PM | Atomic Scale Processing Poster Session |
| AP+PS+TF-WeM | Wednesday, November 8, 2023 8:00 AM | Plasma Deposition and ALD Processes for Coatings and Thin Films |
| AP+PS-FrM | Friday, November 10, 2023 8:20 AM | Atomic Scale Processing Late Breaking Atomic Layer Etching and Area Selective Deposition |