Atomic Layer Deposition for Silicon-Perovskite Tandem Cells

ALD Al₂O₃/SiO_x Multilayers for c-Si Surface Passivation: Modification of Interface Properties by Voltage Stress and Plasma Treatments

Atomic Layer Deposition of Aluminium Doped Zn_1-XMg_XO as Transparent Conducting Films for Photovoltaics

An in-Situ Infrared Spectroscopy Study on the Influence of ALD SnO₂ on Formamidinium-Based Metal Halide Perovskite

Atomic Layer Deposition of Ruthenium Dioxide Thin Films Based on Redox Reactions between RuO₄ and Alcohols

Low Temperature ALD of Ni from Novel Precursors

Enhanced Cation Control in ALD of Alkali Metal Containing Films by Avoiding Water-Reservoir Effects

Atomic Layer Deposition of Lead Halides: PbBr₂ and PbCl₂

Carbene Based Precursors for the ALD of Coinage Metals

Low Temperature ALD of Metals and Nitrides Using Thermally Generated Radical Precursors

Influence of the High Aspect Ratio Geometry to ALD Thin Film Growth

Ultra-Low Temperature ALD of Pure Antimony for Grain Boundary Engineering of Thermoelectric Materials

Infilling Macroscopic Nanoparticle Networks via ALD

Zinc Acetylacetonate on Mesoporous Supports by Atomic Layer Deposition

Synthesis of High Surface Area Metal Oxide Catalyst Supports

ALD on Porous Substrates: From General Formulation to Fibrous Substrates and Scaling Laws

Photon-Activated Metal Ale

Plasma-Assisted Thermal-Cyclic Etching of Silicon Germanium Selective to Germanium

Thermal Atomic Layer Etching of Cobalt with Chlorine Plasma and Hexafluoroacetylacetone (Hhfac)

Thermal-Cyclic Atomic Layer Etching of Cobalt by Plasma Oxidation and Organometallization