ALD/ALE 2022 Wednesday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Wednesday, June 29, 2022
8:30 AM 9:30 AM
PS-WeM1
Welcome, Introductions and Sponsor Thank Yous
ALD 2022 Innovator Awardee Talk: Prospects of Atomic Layer Deposition for Cell-Stacking Technology of Semiconductor Memory Devices
ALD Student Award Finalist Talk: Improving Self-Aligned Atomic Layer Deposited Gate Stacks for Electronic Applications
ALD Student Award Finalist Talk: Towards High Throughput Molecular Layer Deposition of Alucone Films
ALD Student Award Finalist Talk: In-situ FTIR Analysis of Selectivity Loss Mechanism of TiO2 Atomic Layer Deposition on Aminosilane-Passivated SiO2 and H-terminated Si
ALD Student Award Finalist Talk: Sacrificial Etching Kinetics Control Extent of Pattern Alignment in Area-Selective Atomic Layer Deposition (AS-ALD) via Simultaneous Deposition and Etching
ALD Student Award Finalist Talk: Depositing Metal Oxides on Metalcones: Enhancing Initial Growth Through O2 Plasma Densification
Break & Exhibits
Sessions | Time Periods | Topics | Schedule Overview