Atomic Layer Deposition of Perovskite K(Ta_x,Nb_1-x)O₃ films on Silicon for Integrated Photonics via KOtBu and H₂O

Low-temperature ALD Sb₂Te₃ for Self-powered Broad-band Photodetector

Preparation of High Mobility Indium Hydroxide Doped by Atomic Layer Deposition and Study on Photoelectric Properties

ALD MgF2 Using (EtCp) ₂Mg and SF₆ Remote Plasma Source

Moisture Sensitivity of ALD Metal Fluorides for Far UV Optical Coatings

Sub 10-nm Ferroelectric HfO₂ Capacitors Doped with Gd

Controlling Stochastic Resistive Switching in Organic-Inorganic Hybrid Memristor by Vapor-Phase Infiltration

Atomic Layer Deposited Vanadium Oxide Thin Films for Thermocromic and Microelectronic Applications

Brain-Based Inspiration: Towards Neuromorphic Computing With ALD Based Memristive Devices

Deposition of Copper-based Metal-Organic Framework Thin Film by Molecular Layer Deposition

ALD-Grown ZIF-8 Thin Films : Mechanism Insight Leads to Push Beyond the Current Thickness Limit

Molecular Layer Deposition of Zeolitic Imidazolate Framework 8 Thin Films

Mld of Phosphane-Ene Polymer Thin Films: Bringing Solution Polymer Chemistry to a Gas Phase Process

Molecular Atomic Layer Deposition of Inorganic-Organic Hybrid Dry Resist for EUV Application

Atomic Layer Deposition of Layered Chalcogenides

2D Alloys of WS₂ and NbS₂ by PEALD

2D Molybdenum Dichalcogenides by Atomic Layer Deposition

Plasma-enhanced Atomic Layer Deposition of Crystalline MoS₂ Thin Films Using a Novel Precursor