ALD/ALE 2026 ALD Fundamentals: Growth and Characterization Sessions
Topic Abstract Book
(950 KB, Mar 16, 2026)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name | Room |
|---|---|---|---|
| AF-MoA | Monday, June 29, 2026 4:00 PM | ALD Precursor Design I | HB Plant Ballroom |
| AF-MoP | Monday, June 29, 2026 5:45 PM | ALD Fundamentals: Growth and Characterization Poster Session | Tampa Bay Salons 5-9 |
| AF1-TuM | Tuesday, June 30, 2026 8:00 AM | ALD Precursor Design II | HB Plant Ballroom |
| AF2-TuM | Tuesday, June 30, 2026 10:45 AM | Powder ALD | HB Plant Ballroom |
| AF1-TuA | Tuesday, June 30, 2026 1:30 PM | ALD Metrology/Characterization I | HB Plant Ballroom |
| AF2-TuA | Tuesday, June 30, 2026 4:00 PM | ALD Metrology/Characterization II | HB Plant Ballroom |
| AF1-WeM | Wednesday, July 1, 2026 8:00 AM | Plasma Enhanced and Low Temperature ALD | HB Plant Ballroom |
| AF2-WeM | Wednesday, July 1, 2026 10:45 AM | Plasma-enhanced ALD of Nitrides | HB Plant Ballroom |
| AF1-WeA | Wednesday, July 1, 2026 1:30 PM | Modeling for ALD Processes I | HB Plant Ballroom |
| AF2-WeA | Wednesday, July 1, 2026 4:00 PM | Modeling for ALD Processes II | HB Plant Ballroom |