AVS1997 ThA Sessions , Thursday, October 23, 1997 2:00 PM
Thursday Afternoon
Abstract Timeline | Time Periods | Topics | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Topic | Session Name |
|---|---|---|
| AS+MR+MI-ThA | AS | Hard Disc Processing Issues: I |
| EM1-ThA | EM | Surface Processing of Semiconductors |
| EM2-ThA | EM | Novel Dielectrics and Materials for Semiconductors |
| MM-ThA | MM | Processes/Microprobes |
| MS+EM-ThA | MS | Process Fundamentals |
| MS+VT-ThA | MS | In Situ Sensors and Metrology |
| PS-ThA | PS | Plasma Surface Interactions II |
| SS1-ThA | SS | Electronic Structure: Surfaces and Adsorbates |
| SS2-ThA | SS | Reactions on Alloys and Modified Surfaces |
| SS3-ThA | SS | Metal and Semiconductor Surface Structures |
| TF1-ThA | TF | Ex-Situ Characterization |
| TF2-ThA | TF | Energetic Depositions |