AVS1998 Plasma Science and Technology Division Sessions

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Session Code Start Session Name
PS-MoM Monday, November 2, 1998 8:20 AM Feature Evolution
PS1-MoA Monday, November 2, 1998 2:00 PM Environmental Issues and Emerging Technologies
PS2-MoA Monday, November 2, 1998 2:00 PM Diagnostics I
PS-MoP Monday, November 2, 1998 5:30 PM Plasma Science and Technology Poster Session
PS1-TuM Tuesday, November 3, 1998 8:20 AM Pulsed Plasmas
PS2-TuM Tuesday, November 3, 1998 8:20 AM Oxide Etching
PS+MS-TuA Tuesday, November 3, 1998 2:40 PM ULSI Technology
PS-WeM Wednesday, November 4, 1998 8:20 AM Plasma Damage
PS-WeA Wednesday, November 4, 1998 2:00 PM Plasma-Surface Interactions I
PS-ThM Thursday, November 5, 1998 8:20 AM Plasma Applications in Copper Metallization
PS-ThA Thursday, November 5, 1998 2:00 PM Diagnostics II
PS-ThP Thursday, November 5, 1998 5:30 PM Plasma Science and Technology Division Poster Session
PS-FrM Friday, November 6, 1998 8:20 AM Plasma-Surface Interactions - II
Topics | Time Periods | Schedule Overview