The Real World: Surface Analysis Applications and Innovations in Industry

Effect of Sputtering Gas on Cleaning Al-Based Intermetallics and the Determination of Surface Compositions based on Auger Analysis

Failure Mechanisms of Adhesively Bonded Hot Dipped Galvanised Steel Studied by Small Area XPS

Novel X-ray Sensor Suite for In Situ Optimization of Thin Film Architectures

A 300mm SAM, with EDX and FIB for Full Wafer Defect and Thin Film Characterization

A Study of the Surface Chemistry and Physical Properties Related to Adhesion of the Polyimide Passivation Layer by XPS, FTIR, and Contact Angle Measurements

Diffusion of Large Molecules on Metallic Surfaces using TOFSIMS

Identification of Surface Chemical Functional Groups in Reverse Osmosis Membranes: An X-ray Photoelectron Spectroscopy Study

Nucleation and Growth of Calcium Phosphate on Self-Assembled Monolayers

Surface Modification of a Model Biomaterial by UV-Laser and/or Electron Beam Irradiation¹

Synthesis and Surface Characterization of Peptide-Modified Interpenetrating Polymer Networks that Control Biomineralization

Osteoblast Behavior on Surfaces with Varied RGD Peptide Surface Concentrations Prepared Using Gold-Thiol Self-Assembly

Molecular Recognition at the Protein-Biomineral Interface

Kinetics and Interfacial Energy Studies of Biomineralization

Incorporation of Dye Molecules into Calcium Oxalate Host Crystals

Molecular Orientation in Artificial Joint Polymers: Characterizing the Precursors of Wear with Soft X-ray Absorption

Peptide Functionalized Titanium Alloy Surfaces for Orthopedic and Dental Materials

Strength of Nanoscale Copper Under Shear

A Discussion of the Interconnection Science and Technologies

Electrochemical Deposition Cu Films for ULSI Applications

Complete Filling of High-Purity Copper in Subquarter-Micron Trench Structure Using Plasma CVD Reactor with H Atom Source

The Stability of Thin TiN and TaN Layers as Diffusion Barriers for Copper under Thermal Annealing and Bias Temperature Stress Conditions

Surface Modification and Cleaning Enhancement of TaSiN Films with Dilute Hydrofluoric Acid*

Fluroinated Amorphous Carbon - A Low Dielectric Constant Material for Multilevel Interconnect Applications

Multilayered Si-Based Organic Thin Films with Low-Dielectric-Constant Formed by Plasma-Enhanced Chemical Vapor Deposition from Hexamethyldisiloxane

Low-k Si-O-C-H Composite Films Prepared by Plasma Enhanced Chemical Vapor Deposition using BTMSM(bis-trimethylsilylmethane) Precursor

Dielectric Passivation/Oxides on Compound Semiconductors

Study of GaAs Oxidation in H₂O₂ and H₂O using Spectroscopic Ellipsometry

The Effective Two-step Passivation of Metal/GaAs Interface with Sulfur and Hydrogen Plasma

Advanced Selective Dry Etching of GaAs/AlGaAs in High Density Inductively Coupled Plasmas

Characterization of Hydrogen Passivation in p-type InP (100)

Synchrotron Radiation-Induced Wet Processing of GaAs*

1-D Propagation of a Magnetic Domain Wall in Submicron Magnetic Wire

Magnetism of Interconnected Co Nanodots Grown on the N-modified Cu(001) Surface

Periodic Magnetic Microstructures using Glancing Angle Deposition

Magnetic Quantum Cellular Automata

Growth, Magnetization, and Magnetoresistance of Self-Assembled Lateral Multilayers

Stripe Domains in Ultraflat Fe/Cu(001) Particles

Magnetic Properties of Iron Clusters Deposited on Graphite

Magnetic Properties of Co and Fe Particles on Sapphire Single Crystal Surfaces

Magnetic Behavior of Nanosize Cobalt Particles in (SiO₂, MgO, CoO) Matrix

Magnetic Micromachining Technology: From Materials to Components to Actuators

Fabrication and Characterization of Polycrystalline Silicon Thin Films with Hydrofluoric Acid Permeability for Sacrificial Etching of Underlying Oxide Layers

A New Chemistry for Rapid Etching of SiO₂

Residual Stress Characterization of Thick PECVD Oxide Films for MEMS Applications

Process and Fabrication of a Thin Film PZT Pressure Sensor

Microfabricated Low-Power Broad-Band Light Source Utilizing Tungsten Filaments

ESH as One of the Key Criteria for Semiconductor Process Development

The Environmental Impact of Perfluorinated Compounds used in the Semiconductor Industry

Optimization of Processing Plasmas in the Semiconductor Industry for Minimal Environmental Impact

PFC Abatement in Inductively Coupled Plasma Reactors using O₂, H₂ and H₂O as Additive Gases¹

Modeling of Nonisothermal, Coupled Neutral/Plasma Dynamics in PFC Abatement Plasmas

Remote Plasma Sources for Cleaning CVD Reactors: Development and Implementation of a Technology for Green Manufacturing of Integrated Circuits

Study of NF₃-Based High Density Plasma Oxide Etch Processes for Reduced Global Warming Emissions

Environmentally Harmonized Silicon Oxide Selective Etching Process Employing Novel Radical Injection Technique

Carbon Nanotube Molecular Electronics

Electrical Transport in Single-Wall Nanotube Rings: Coherence and Localization

Analysis of Carbon Nanotube Field-Effect-Transistors (FETs)

Novel Length Scales in Nanotube Devices

Field Emission from Carbon Nanotubes and Its Application to Electron Sources in Display Elements

Emission Properties of Large-area, Fully-sealed Carbon Nanotube Field Emission Display

The Structure of Nanotubes Observed with Thermal Field Emission

Fabrication and Field Emission Properties of Adherent Carbon Nanotube Films

Characterization of Oriented Carbon Nanotube Cathodes for Field Emission Flat Panel Display and Light Source Applications

Theoretical Analysis of the Interactions of Chemically Reactive Clusters from Silane Plasmas with Crystalline and Amorphous Silicon Surfaces

Hydrogen Atom Reactions in a-SiC:H Film Growth

An In Situ Study of Plasma Deposition of Hydrogenated Amorphous Silicon Using Multiple Total Internal Reflection Infrared Spectroscopy

Plasma and Surface Chemistry in a Remote Silane Plasma Studied By Various Diagnostics and Related to a-Si:H Film Quality

Competition Between Etching and Deposition in Methane/Hydrogen Plasma Interactions with the Si(100) Surface

A Multi-dimensional Model for an Inductively Coupled Ar/C₄F₈ Discharge

Inorganic Plasma Low-k Materials - Aurora 2.7 -

Plasma Modification of Polymeric Membranes

Polymer Surfaces Modified Using RF Plasma

Two-Dimensional Phase Transitions in Amphiphile Monolayers

Surface Phase Transitions of Asymmetric Dialkyl Disulfide Self-Assembled Monolayers

Structure, Bonding and Reactivity of Self-assembled Monolayers

Structure of Partially Fluorinated n-alkanethiols on Polycrystalline Gold and Silver Surfaces

Controlling the Placement of Molecules in the Self Assembly and Directed Assembly of Organic Monolayers

Protein Adsorption to Model Surfaces: Probe Adhesion Between Fibrinogen and Patterned SAMs

Modification of Self-Assembled Monolayers by X-ray, Electron and Thermal Treatments

Electron-induced Damage in Thio-functionalized Alkanethiol Monolayers

Sensitivity of Alkanethiol Self-assembled Monolayers toward Low-energy Electron Irradiation

Evolving Surface Morphology: An In Situ STM Study of 2-20 nm SiGe Quantum Wells Grown on 75 mm Si (100) Wafers

Hydrogen-Mediated Surface Morphological Evolution in Si_0.7Ge_0.3/Si(001) Layers Grown by Hydride Gas-source Molecular Beam Epitaxy

Interdiffusion During Growth of Ge on Si(100)

Confined Intermixing of Ge and Si

Surface Segregation and Surface Reactivity in Heteroepitaxial Vapor Phase Thin Film Growth: Si_1-xGe_x on Si(111)

The Role of Arsenic Surfactant in the Growth of Germanium Thin Films on Si(100) Surfaces

The Dynamics of the Si(111) (7x7) to (1x1) Phase Transition Investigated by Low Energy Electron Microscopy

The Motion of Atomic Steps on Ultra-Flat Si(111)

Novel Growth Behavior of Ge on Pb Covered Si(111) Surface

The Growth of High Density, Small Ag Islands at the Si(111)7x7 Surfaces with Adatom Defects

Determination of Sticking Probability and Transition State Energy by Line-of-Sight Detection: Halocarbons on Cu(111)

Demonstration of Angle Resolved Auger-photoelectron Coincidence Spectroscopy from a Solid: First Results from the Cu(111) Surface

Multiple Atom Resonant Photoemission: A New Tool for Determining Near-Neighbor Atomic Identities and Bonding

Incident Beam Diffraction in Electron Stimulated Desorption

Direct Atomistic Observation of Structural Dynamics in Surfaces and Interfaces by Time-Resolved High-Resolution Transmission Electron Microscopy

Ionization Mechanisms of Water in High Interfacial Electric Fields

Free Electron Laser Nanospectroscopy Interface Applications

Imaging and Charge Transport Measurements using Dual-Probe Scanning Tunneling Microscopy

The Miniature Cylindrical Mirror Analyzer: A New Tool For Surface Analysis

Investigations of Surface Reactions on Thin Film-Supported Catalysts Using Microhotplate Arrays

Thin Films from Slow and Energetic Cluster Impact

Spark-Processing - A Novel Technique to Prepare Light-Emitting, Nanocrystalline Silicon Films

Interesting Properties of Nanophase Films Deposited from a High-rate, Nanoparticle Beam

Simulation of Fundamental Physical Phenomena in the Deposition of Nanophase Thin Films using a Sputtering Based Source

Deposited Porous Silicon on Insulator Substrates

Optical Properties of Chiral Thin Film Nanostructures and Composites

Solid State Electrochromic Devices for Thermal Emittance Control

Correlation Between Phase Constituency and Near Ultraviolet Optical Absorption in Nanophase Titania Films

A Comparison of Outgassing Rates from Stainless and Carbon Steels

Experiments with Thin-Walled Stainless Steel Vacuum Chamber

Review of Models for the Outgassing of Water Vapor from Metallic Surfaces

Measuring and Locating Internal Helium Leaks in the RHIC Insulating Vacuum System

Contraflow Leak Detectors with Improved Sensitivity Under High Helium Background Conditions*

LIGO Beam Tube Component and Module Leak Testing

Low-flow Measurements Techniques for Calibrating Mass Flow Controllers

Dimensionless Parameters for Laminar Flowmeters

Decay Rate of Photoresist Outgassing from Ion Implantation