AVS2008 Plasma Science and Technology Sessions

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Session Code Start Session Name
PS-MoM Monday, October 20, 2008 8:20 AM Plasma Etching for Advanced Interconnects
PS-MoA Monday, October 20, 2008 2:00 PM Invited Highlights on Plasma-Surface Interactions - Honoring the Distinguished Career of Herbert H. Sawin
PS-TuM Tuesday, October 21, 2008 8:00 AM Advanced Gate Etching
PS-TuA Tuesday, October 21, 2008 1:40 PM Fundamentals of Plasma-Surface Interactions I
PS-TuP Tuesday, October 21, 2008 6:30 PM Plasma Science Poster Session
PS1-WeM Wednesday, October 22, 2008 8:00 AM Plasma-Surface Interactions in Materials Processing I
PS2-WeM Wednesday, October 22, 2008 8:00 AM Plasma Sources
PS1-WeA Wednesday, October 22, 2008 1:40 PM Fundamentals of Plasma-Surface Interactions II
PS2-WeA Wednesday, October 22, 2008 1:40 PM Plasma Diagnostics, Sensors, and Control I
PS1-ThM Thursday, October 23, 2008 8:00 AM Atmospheric Plasma Processing and Micro Plasmas
PS2-ThM Thursday, October 23, 2008 8:00 AM Plasma Modeling
PS1-ThA Thursday, October 23, 2008 2:00 PM Plasma Diagnostics, Sensors, and Control II
PS2-ThA Thursday, October 23, 2008 2:00 PM Plasma Deposition and Plasma Enhanced Atomic Layer Deposition and Etching
PS-ThP Thursday, October 23, 2008 6:00 PM Plasma Science Poster Session
PS1-FrM Friday, October 24, 2008 8:20 AM Plasma-Surface Interactions in Materials Processing II
PS2-FrM Friday, October 24, 2008 8:20 AM Plasma Processing for 3-D Integration, Photonics, Optoelectronics, and Memory Devices
Topics | Time Periods | Schedule Overview