AVS2013 Plasma Science and Technology Sessions
Click a Session Code to view its Abstracts
Topics | Time Periods | Schedule Overview
| Session Code | Start | Session Name |
|---|---|---|
| PS+AS+BI+SE-MoM | Monday, October 28, 2013 8:20 AM | Atmospheric Plasma Processing: Fundamental and Applications |
| PS-MoM | Monday, October 28, 2013 8:20 AM | Innovative Chemistries for Advanced Etch Processes |
| PS+TF-MoA | Monday, October 28, 2013 2:00 PM | Plasma Deposition |
| PS-MoA | Monday, October 28, 2013 2:00 PM | Advanced BEOL/Interconnect Etching |
| PS1-TuM | Tuesday, October 29, 2013 8:00 AM | Plasma Sources |
| PS2-TuM | Tuesday, October 29, 2013 8:00 AM | Advanced FEOL/Gate Etching |
| PS1-TuA | Tuesday, October 29, 2013 2:00 PM | Plasma Diagnostics, Sensors and Control |
| PS2-TuA | Tuesday, October 29, 2013 2:00 PM | Deep Etch Processes for Vias, Trenches and MEMS |
| PS-TuP | Tuesday, October 29, 2013 6:00 PM | Plasma Science and Technology Poster Session |
| PS-WeM | Wednesday, October 30, 2013 8:00 AM | Fundamentals of Plasma Surface Interactions |
| PS-WeA | Wednesday, October 30, 2013 2:00 PM | PSTD at AVS60: Looking Back and Moving Forward |
| PS+AS+NS+SS-ThM | Thursday, October 31, 2013 8:00 AM | Plasma Synthesis of Nanostructures |
| PS-ThM | Thursday, October 31, 2013 8:00 AM | Plasma Modeling |
| PS-ThA | Thursday, October 31, 2013 2:00 PM | Low Damage Processing |