AVS 70 Atomic Scale Processing Mini-Symposium Sessions
Topic Abstract Book
(899 KB, Oct 31, 2024)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| AP+EM+PS+TF-MoM | Monday, November 4, 2024 8:15 AM | Area Selective Deposition (ASD) I |
| AP1+EM+PS+TF-MoA | Monday, November 4, 2024 2:30 PM | Area Selective Deposition (ASD) II |
| AP2+EM+PS+TF-MoA | Monday, November 4, 2024 4:00 PM | Modeling and Simulations of Atomic Layer Processing |
| AP1+EM+PS+TF-TuM | Tuesday, November 5, 2024 8:00 AM | Atomic Layer Etching I: Thermal Processes |
| AP2+EM+PS+TF-TuM | Tuesday, November 5, 2024 11:00 AM | Atomic Layer Etching II: Energy-Enhanced Processes |
| AP+PS+TF-TuA | Tuesday, November 5, 2024 2:15 PM | Atomic Layer Etching III: Plasma Processes |
| AP1+EM+PS+TF-WeM | Wednesday, November 6, 2024 8:00 AM | Energy-Enhanced Atomic Layer Processing |
| AP2+EM+PS+TF-WeM | Wednesday, November 6, 2024 11:00 AM | New Advances in Atomic Layer Deposition |
| AP-ThP | Thursday, November 7, 2024 4:30 PM | Atomic Scale Processing Mini-Symposium Poster Session |