ALD2020 Atomic Layer Etching Sessions
Click a Session Code to view its Abstracts
Topic Abstract Book
(423KB, Jul 28, 2020)
Topics
| Time Periods
| Schedule Overview
| Session Code | Start | Session Name |
|---|---|---|
| ALE1-MoA | Monday, June 29, 2020 1:30 PM | ALE of Metals and Alloys |
| ALE2-MoA | Monday, June 29, 2020 4:15 PM | ALE of Metal Oxides |
| ALE-MoP | Monday, June 29, 2020 5:45 PM | Atomic Layer Etching Poster Session |
| ALE1-TuM | Tuesday, June 30, 2020 9:00 AM | ALE Selectivity and Anisotropy |
| ALE2-TuM | Tuesday, June 30, 2020 10:00 AM | ALE for GaN Devices |
| ALE1-TuA | Tuesday, June 30, 2020 1:00 PM | ALE of Si-based Materials |
| ALE2-TuA | Tuesday, June 30, 2020 4:30 PM | Novel ALE Techniques and Materials |