ALD/ALE 2022 MoA Sessions , Monday, June 27, 2022 1:30 PM
Monday Afternoon
Abstract Timeline | Time Periods | Topics | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Topic | Session Name |
|---|---|---|
| AA1-MoA | AA | ALD for Catalysis |
| AA2-MoA | AA | ALD for Energy Storage |
| AF1-MoA | AF | New Precursors and Processes II |
| AF2-MoA | AF | Simulation, Modeling, and Theory of ALD I |
| AF3-MoA | AF | Plasma Enhanced ALD |
| AF4-MoA | AF | Surface Science |
| ALE1-MoA | ALE | Thermal and/or Isotropic ALE II |
| ALE2-MoA | ALE | Plasma and/or Anisotropic ALE I |