Plasma-assisted ALD of IrO₂ for Neuroelectronic Applications

Atomic Layer Deposition (Ald) on 5-Aminosalicylic Acid for Delayed and Targeted Drug Release Treatment of Inflammatory Bowel Disease

Atomic Layer Deposition Enables Dimensionless, Biocompatible Encasings for Medical Implants Pro-Longing Their Lifetime

High ALD Equipment and Precursor Demand and 5-Year Forecast Due to Continued Semiconductor Device Scaling and Fab Expansions

High-k Gate Dielectrics for ScAlN Barrier HEMT Structures

Ultra-thin High-κ Dielectrics Growth by ALD on MoS₂

Fabrication of a MOSFET Based on ZnO Using an Atomic Layer 3D-printer

Theoretical Understanding on the Chemical Principles of Atomic Layer Deposition

A Study of Area-Selective TiO₂ Deposition Using First Principles Based Thermodynamic Simulations

Chemistry of Plasma Enhanced Atomic Layer Deposition of Co using CoCp2 and Nitrogen/Hydrogen Plasma

Adsorption Mechanics of Trimethyl Metal Precursors on AlN, GaN and InN

Atomic Layer Processing Approach for Achieving Abrupt Epitaxial Interfaces on AlN

Surface Modification for Atomic Layer Etching of TiAlC Using Floating Wire-Assisted Liquid Vapor Plasma at Medium Pressure