AVS2000 Thursday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Thursday, October 5, 2000
8:20 AM 9:20 AM 10:20 AM
Engineering Life into Nanofabricated Systems
Powering Molecular Shuttles through an Artificial Photosynthetic System
Unbinding Process of Adsorbed Proteins under External Stress Studied by AFM Force Spectroscopy
Single-Molecule Protein-Ligand Bond-Rupture Forces Measured Using the Poisson Atomic Force Method
Measuring the Mechanical Properties of Soft Samples by Atomic Force Microscopy
Protein Adsorption and Monocyte Activation on Ge Nanopyramids
Oxidation of Clean and H-passivated Silicon by Molecular and Atomic Oxygen
New Oxidation Process Using Collimated Hyperthermal Ozone Beam
Nondestructive Investigation of the Si/SiO2 Interface by Spectroscopic Ellipsometry, Reflectance Difference Spectroscopy, Second Harmonic Generation, and X-ray Photoelectron Spectroscopy
Core-level Photoemission of Interface States on SiO2/Si: Substrate Orientation Effects
Spectroscopic and Electrical Characterization of the Evolution of Chemical Oxides Into Ultrathin Gate Oxides
Studies on Accurate Determination of the Physical Thickness of nm Gate Oxides and its Correlation with the Electric Thickness
Bonding of Nitrogen in Silicon Oxynitride Films
Photoemission Investigation of Nitrogen Incorporation at the Si/SiO2 Interface
Investigation of Fluorine in Dry Ultrathin Silicon Oxides
Studies on Electrical Properties of Ultrathin Oxides of Silicon Grown by Wet Oxidation at Low Water Vapor Pressure
Properties of SiO2 Thin Films Deposited at Low Temperature on SiGe and Si Samples in O2/TEOS Helicon Plasmas
Quantification of Polymer Surface Composition Based on ToF-SIMS Data
Characterisation of Polymer Additives by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
Surface Composition of Poly(imidesiloxane) Copolymers Containing Multiple Siloxane Lengths
High Spatial Resolution XPS and FTIR: An Approach to 3-D Characterization of Polymer Blends
Iron Metallization of Fluorinated Organic Films; A Combined XPS and AFM Study
Interactions of Cu(I) with the Surface of a Novel Poly(imidazole)
Study of Semicrystalline Poly(ethylene terephthalate) by Atomic Force Microscopy
Morphology of Catalytically Formed Polyethylene on a Planar Model System for the Phillips (CrOx / SiO2) Catalyst
Nano-Mechanics of Polymer Surfaces
New Directions for Semiconductors
Electron Spin Relaxation at Nanometer Length Scales Near a Ferromagnet
Ferromagnetic Resonance of Monodisperse Co Particles
Magnetic Mirages
Correlation of Structural and Magnetic Properties of Ultra-Thin Fe-Films on W(110) by Spin-Polarized STM/STS
Current-driven Magnetization Reversal in Nanopillars
Patterning of Co/Pt Multilayers: Topological vs. Magnetic
Microfabrication Technologies for Biomedical Applications
Suppression of Blood Serum Adhesion on Quartz Inner Wall of Microcapillary Coated by Bio-compatible MPC Polymer
Biologically-Compatible Polymeric MEMS Devices Fabricated using Holographic Two-Photon Induced Photopolymerization
Patch Clamping with Microfabricated Planar Electrodes
High Sensitivity Resonant Biosensor
Nanofluidic Entropic Trap Array device for DNA Separation
Integration of Microcapillary Electroporesis and Inductively Coupled Plasma Spectrometry for Rapid Biological/Chemical Analysis
Silicone Elastomer Microwell Arrays for High Throughput Protein Biochemical Assays
Development of a Micro Capillary Pumped Loop System for Microelectronic Device Cooling
Design, Fabrication, and Testing of Cross Flow Micro Heat Exchanger
Simulation of Transient Enhanced Diffusion of B in Si
New Physics for Models of Transient Enhanced Diffusion
Fast-Ramp Annealing for Reducing Implant-Induced Transient Enhanced Diffusion
Dynamic Simulation: Guiding Manufacturing from Process Mechanisms to Factory Operations
Integrated Metrology with Run to Run Control
W CVD Thickness Metrology and Run-to-Run Control using Mass Spectrometry
Feedback Control of Morphology During III-V Semiconductor Growth by Molecular Beam Epitaxy1
Data Requirements and Communication Issues for Advanced Process Control
Implantation and Pinning of Size-selected Ag Nanoclusters at the Graphite Surface
Self-organization of Pt Nanoparticles on Surfaces in Catalytic Reaction
Quantum-Coherence and Self-Assembly of Metallic Nanostructures
Immobilization and Isolation of Molecule Corral Nanostructures Produced on Highly Oriented Pyrolytic Graphite
Ultraflat Nanosphere Lithography
Controlled Growth of Metal Nanoclusters on Polymers
Noble Metal Nanoparticles in Polymeric Thin Films
Biomimetic Self-Assembly
Cluster Size Effect Observed for Gold and Silver Sulfide Nanoparticles Synthesized by Sol-Gel Technique as Studied by X-ray Photoelectron Spectroscopy
Highly Ordered Layers of Large Conjugated π-systems on Cu(111): A Novel Preparation Method
The Effect of Conjugation Length on the Frontier Orbital Position of Oligothiophene Derivatives at Metal-organic Interface
Electronic Properties of π-Conjugated Organic Molecular Semiconductor Interfaces
Effect of Alkyl Substituents on the Adsorption of Thienylenevinylene Oligomers on the Si(100) Surface
Growth of Films of Thiophene Oligomers by Seeded Supersonic Beams to Improve Control on their Quality and Properties
Scanning Tunneling Microscopy/Spectroscopy Investigation of the Organic Molecules PTCDA and HBC on Au(100)
STM, AFM, & Electrochemical Investigations of Squaraine Thin Films
Work Function Modification and Surface Chemistry of Indium Tin Oxide with Organosilane Self Assembled Monolayers
Effect of Fluoride Layer Insertion on the Electronic Structures of Al/Organic Interfaces1
Interface of Aluminum and Poly(vinylidene fluoride with Trifluoroethylene) Copolymer
Analysis of Pulsed O2/TEOS Helicon Plasmas by Time-resolved Optical Spectroscopy
Aluminum Oxide Deposition in an Ionized PVD System
Surface Transport Kinetics in Plasma Deposition of Hydrogenated Amorphous Silicon
Hydrogenated Amorphous Silicon Fractal Growth and its Relation to the Growth Mechanism
Interactions of Chemically Reactive Radicals with Si Growth Surfaces during Plasma Deposition of Si Thin Films
SiHx Radical Densities in a Remote SiH4 Plasma for High Rate Deposition of a-Si:H
Fundamentals of Plasma Enhanced Chemical Vapor Deposition
Thin Film Growth via Surface Reactions of CH3, C2H2 and H as Investigated by Radical Beam Experiments
Deposition Kinetics in Methane rf Glow Discharges: A Combined Experimental and Modeling Study
Using Plasma Energetics to Influence Silicon Nitride Step Coverage
Advanced Actinometry of Inductively Coupled Cl2-Ar Plasmas For Plasma Etching
Diagnostics of Inductively Coupled Chlorine Plasmas: Measurements of the Neutral Gas Temperature
A New Diagnostic Method for Monitoring Plasma Reactor Walls: Multiple Total Internal Reflection Infrared Surface Probe
Laser-Aided Diagnostics of Discharge Plasmas
Energy Distributions of Incident Ions to a RF-Biased Substratep
Energy and Angular Distribution of Ions Effusing from a Hole in Contact with a High Density Plasma
Electron Temperature and Ion Energy Measurements with A High-resolution, Sub-micron, Retarding Field Analyzer
Mass Resolved Ion Energy Distribution Measurements in an Inductively Coupled H2/Ar Plasma with a Highly Collisional Presheath
Langmuir Probe Analysis for High Density Plasmas
Single Photon Ionization as a Probe of Radicals in Hot-Wire and Plasma Processing
Step Structures and Energies on Vicinal Si(001) Monohydride Surfaces: Dependence on H Chemical Potential
Si(100) Surface Roughening and H Atom Absorption: Surface and Bulk Characterizations.
Dissociation Pathways of Molecular Hydrogen on Silicon Surfaces1
Hydrogen Bonding on Compound Semiconductor Surfaces
Scanning Tunneling Microscopy of Low Temperature Adsorption H2 on GaAs(001)
Theoretical Approaches for Predicting SiGe Heteroepitaxy
Real-time Monitoring of H2 Adsorption on C(001) at High Temperature by Ultraviolet Photoelectron Spectroscopy
Infrared Studies of Hydrogen on Diamond (100)
Fundamental Connection Between the ESD of H/D at Silicon Surfaces and at Oxide/Silicon Interfaces
Depth-Resolved Determination of the Hydrogen Concentration at Buried SiO2/Si(100) Interfaces by Resonant Nuclear Reaction Analysis
Synthesis and Characterization of Self-assembled Cu2O Quantum Dots on SrTiO3(001) Surface
Correlation of Electronic Structure with Photoluminescence Properties in Oxidized Silicon Nanoclusters
The Behavior of Ultrathin Al2O3 Films in Very High Electric Fields: STM-induced Pitting and Dielectric Breakdown
Oxidation of Sn/Pt (111) Surface Alloys under UHV Conditions- Formation of Ultrathin SnOx Films on Pt(111)
Monte Carlo Simulation of Initial Al(111) Oxidation
Thin Epitaxial Oxide Films and Interfaces for Advanced Microlectronics and Magnetics
The Oxidation of Pd(100)
Surface Characterization of Oxidative Corrosion of U-Nb Alloys
AFM Non-contact Imaging of Titaniumdioxid at Variable Temperatures
Plasma Oxidation as a Tool to Design Oxide Films at Low Temperatures
Alkali Metal and H2O Co-adsorption and Reaction on Graphite(0001)
Adsorption of Hydrogen on Clean and Alkali-modified Low-index and Stepped Copper Surfaces
Angle Resolved Photoemission Study on Adsorption and Desorption of Cobaltocene on Cu(111)
Angle Effects on the Nucleation of Polymeric Thin Films from Molecular Cluster Deposition: Molecular Dynamics Simulations
Geometrical Structure and Orientation of Metal Tetraphenylporphyrins on Au (111)
Experimental and Theoretical STM Imaging of Xylene Isomers on Pd(111)1
Reactions of cis-, trans-, and 1,1-dichloroethene on Pd(111) Studied by TDS, LITD, and STM
Wet Oxidation of CO on Pt(111)
The Behavior of Zirconium Surfaces in the Presence of Oxygen, Nitrogen, and Hydrogen Containing Adsorbates
Chlorosilane Adsorption on Clean Si Surfaces: STM and FT-IR Studies
A Far-IRAS Study of Water Adsorption on V2O3(0001)
Polar Oxide Surfaces
Helium Atom Scattering Study of the Surface Structure and Dynamics of in situ Cleaved MgO(001) Single Crystals1
Molecular Beam Epitaxy-Scanning Tunneling Microscopy of Wurtzite GaN Thin Films
One-Dimensional Noble Metal Growth on Si(5 5 12)
Stability and Nuclear Formation of Si(111)-7x7 Structure as Determined from Charge Redistribution in Surface Layers
First Principles Study of Cross-sectional Surface Structure of III-V Heterostructures
Reflectance Difference Spectroscopy of Mixed Arsenic-Rich Phases of Gallium Arsenide (001)
Dynamics of the Flip-Flop Motion of Single Buckled Dimers of Si(100)
Molecular Dynamics Simulations of Energetic Silicon Cluster Deposition on Graphite (0001)
Optical Thin Film Multilayer Systems for Thermal Emittance Modulation in the 300K Blackbody Spectral Region
Structural Characterization of High and Low Index PECVD Optical Coating Materials: The Case of Titanium Dioxide and Silicon Dioxide
Porous Thin Film Microstructure Control for Tuned Optical Properties
Development of a PECVD Antireflective Layer for 193nm Polysilicon Gate Applications
Characterizing Bi-Layer ARC for Advanced Lithography
A Near-grazing-incidence, Antireflective Coating for 121.6 nm for a Mars-bound Neutral Particle Detector.
Studies of Pulsed DC Power in Magnetron Sputtering Systems
Art and Science of Fabricating Optical Coatings by PECVD
Inhomogeneous Optical Coatings Deposited by Plasma
Uranium Coated Optics for Space Applications in the Extreme Ultraviolet
Design, Construction and Maintenance of Large Vacuum Systems
Design of the US Spallation Neutron Source Ring Vacuum Systems
The Interesting and Important Problem of Water in Vacuum Systems
Large Motion Feedthrough Designs for Ultra Accurate Positioning in Vacuum
Design and Operation of Scroll Type Dry Primary Vacuum Pumps
Influence of the Production Parameters on the Vacuum Properties of Ti-Zr-V Non-evaporable Getter Films
Influence of the Elemental Composition and Crystal Structure on the Vacuum Properties of Ti-Zr-V Non-evaporable Getter Films
Miniature Vacuum Pumps
Sessions | Time Periods | Topics | Schedule Overview