AVS2012 Plasma Science and Technology Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS+EM-MoM | Monday, October 29, 2012 8:20 AM | Atmospheric Plasma Processing and Micro Plasmas |
| PS-MoM | Monday, October 29, 2012 8:20 AM | Advanced FEOL/Gate Etching 1 |
| PS+BI-MoA | Monday, October 29, 2012 2:00 PM | Applications of (Multiphase) Atmospheric Plasmas (including Medicine and Biological Applications) |
| PS2-MoA | Monday, October 29, 2012 2:00 PM | Plasma Modeling |
| PS1-TuM | Tuesday, October 30, 2012 8:00 AM | Plasma Diagnostics, Sensors and Control 1 |
| PS2-TuM | Tuesday, October 30, 2012 8:00 AM | Advanced FEOL/Gate Etching 2 |
| PS1-TuA | Tuesday, October 30, 2012 2:00 PM | Plasma Deposition and Plasma Enhanced ALD |
| PS2-TuA | Tuesday, October 30, 2012 2:00 PM | Plasma Surface Interaction during Plasma Etching |
| PS+TC-WeM | Wednesday, October 31, 2012 8:00 AM | Atmospheric Plasma Processing for PV, Flexible Electronics (incl. R2R) |
| PS-WeM | Wednesday, October 31, 2012 8:00 AM | Advanced BEOL/Interconnect Etching |
| PS1-WeA | Wednesday, October 31, 2012 2:00 PM | Plasma Diagnostics, Sensors and Control 2 |
| PS2-WeA | Wednesday, October 31, 2012 2:00 PM | Plasma Surface Interactions during PECVD and Plasma Surface Modification |
| PS1-ThM | Thursday, November 1, 2012 8:20 AM | Plasma Processing for Disruptive Technologies (NVM, TSV, etc.) |
| PS2-ThM | Thursday, November 1, 2012 8:00 AM | Low Damage Processing |
| PS-ThA | Thursday, November 1, 2012 2:00 PM | Plasma Sources |
| PS-ThP | Thursday, November 1, 2012 6:00 PM | Plasma Science and Technology Poster Session |