AVS 71 Atomic Scale Processing Mini-Symposium Sessions
Topic Abstract Book
(859 KB, Sep 18, 2025)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| AP+PS+TF-WeM | Wednesday, September 24, 2025 8:00 AM | Thermal and Plasma-Enhanced Atomic Layer Deposition |
| AP+PS+TF-WeA | Wednesday, September 24, 2025 2:15 PM | Thermal and Plasma enhanced Atomic Layer Etching |
| AP+AS+EL+EM+PS+TF-ThM | Thursday, September 25, 2025 8:00 AM | Advancing Atomic Scale Processing through Modeling and Simulation |
| AP+PS+TF-ThA | Thursday, September 25, 2025 2:15 PM | Emerging Applications for Atomic Scale Processing (ALD/ALE) including Precursors and Surface Reactions |
| AP-ThP | Thursday, September 25, 2025 4:30 PM | Atomic Scale Processing Poster Session |
| AP+EM+PS+TF-FrM | Friday, September 26, 2025 8:15 AM | Area Selective Processing and Patterning |