AVS 71 Wednesday Afternoon

Process Discovery for Quantum Materials

Selective Area Epitaxy of van der Waals Materials

Precision Synthesis and Conversion of 2D Materials by Pulsed Laser Deposition with in Situ Diagnostics

AVS Peter Mark Memorial Award Talk: Exploiting Thin Film Phase Diagrams for Synthesizing 2D Transition Metal Dichalcogenides

Designer van der Waals Materials for Quantum Optical Emission

Macroscopic Tin Monochalcogenide Van Der Waals Ferroics: Growth, Domain Structures, Curie Temperatures and Lateral Heterostructures

Machine Learning Analysis of Molecular Beam Epitaxy Growth Conditions

Promoting Crystallographic Alignment in SnSe Thin Films using Step Edges on MgO by MBE

Synthesis of Millimeter-Scale Single-Crystal α-MoO₃ Nanosheets on Sapphire

Studying the Impacts of Growth Temperature and Seeding Promoters on the Structural and Optoelectronic Properties of ReS₂ Grown by CVD

Growth and Characterization of InSe Thin Films on GaAs(111)B and Si(111)

Selectivity During Spontaneous Dry Thermal Etching of Si-Based Materials by Hydrogen Fluoride

ZrO2 Thermal Atomic Layer Etching Using HF for Fluorination and TiCl4 for Ligand Exchange: Effect of Processing Parameters

SiO₂ Etching by HF in a Liquid-Like H₂O Layer in a Vacuum Environment

Wet-Like Atomic Layer Etching of WCN by Applying the Leidenfrost Effect to Obtain Floating Nanomist-Assisted Vapor Etching

Thermal Atomic Layer Etching of Hafnium–Zirconium Oxide (HZO) Using Organofluorides for Fluorination

Selective Atomic Layer Etching of SiO₂ over Si₃N₄ via TMA Surface modification and SF6 Remote Plasma 

Mitigating Redeposition in Directional Atomic Layer Etching of Lithium Niobate Using HBr Plasma

Atomic Layer Etching of Sputter-Deposited AlN Thin Films in Cl2-Ar Plasmas

Sub-Surface TiO2 Atomic Layer Etching (ALE) Through W Films

Pulsed Plasma Strategies for High-Precision Pseudo-Atomic Layer Etching

Development of Atomic Layer Etching Process Dedicated to Diamond Electronic Devices

Atomic Layer Etching for Vertical Trench Control and Electrical Optimization in HDLK Materials

Mechanisms of Atomic Layer Etching of Ni3Al

In-situ Comparative Analysis of Surface Reactions During Isotropic Atomic Layer Etching of TiC under Various Plasma Chemistries and Infrared Heating

Exploring Technologically Relevant Interfaces with Advanced Spectroscopy and Surface Techniques: Chemical Analysis Under Reaction Conditions Meets 2-D Electron Gas Materials

Optimizing in situ liquid ToF-SIMS using SALVI and IONTOF M5-NCS

First Principles-Based Defect Engineering to Enhance Layered Ni-rich Cathode Performance

Infrared Nanoscopy of Electron-Beam Modified Metal Organic Frameworks

Probing the Electronic-Ionic-Mechanical Coupling at Solid-Electrolyte/Electrode Interfaces

Impact of Precursor Purge Time on the Performance of Ferroelectric Hf0.5Zr0.5O2 Prepared by Plasma-Enhanced Atomic Layer Deposition

Effect of Atomic Layer Annealing Duration on Phase Stabilization of Hafnium Zirconium Oxide Thin Films

Understanding Time-Dependent Imprint in Hafnium Zirconium Oxide Based Ferroelectric Tunnel Junctions

Disentangling Gamma-Ray Radiation Effects and Time-Dependent Imprint on Ferroelectric Hafnium Zirconium Oxide-Based Devices

In-Situ Characterisation of Solid Electrolyte Interphase Formation on Lithium Metal for Energy Storage

Intercalation of Polyacrylonitrile Nanoparticles in Ti3C2 MXene Layersfor Improved Supercapacitance

Writable and Spectrally Tunable Cadmium Oxide Plasmonics via Gallium-Ion Implantation

Nano-Plasmonics for Hybrid, Far IR Photodetection: Simulation and Fabrication

Probing Heterogeneity in 2D van der Waals Materials via Cryogenic STEM

Examining the influence of magnetic and electron beam probes on the topologically-protected edge states of 2D Bi2Te3 Nanoplates

Surface of Topological Weyl Semimetal PtBi1.6

Visualizing Electronic and Magnetic Structure at Nanoscale for Spintronics

Layered Systems for Spintronics and Quantum Sensing of Spin Dynamics

Surface Electronic Structure Comparison of Fe-Intercalated and 2h-TaS₂

Chirality, Surface Termination and Anti-ferromagnetic Alignment in Fe(III) Spin Crossover Salts

Impact of Nanoscale Curvature on the Structural and Magnetic Properties of Co/Pd Alloys

Emergence of local magnetic moment in ternary TaWSe₂ single crystal via atomic clustering

The Role of Defects in Ion Induced 𝛽-Ga2O3 to 𝛾-Ga₂O₃ Conversion

Development of Heavy Noble Gas Field Ion Sources Using an Iridium Coated Single Crystalline Tungsten Emitter

Unconventional Superconductivity in Quasi-1D ZrTe₃ Revealed by Ultra-Low-Temperature Scanning Tunneling Microscopy

Electronic and Phononic Structure of Doped Graphene/Perovskite Oxide Hybrid Heterostructure Studied by Scanning Tunneling Microscopy

Unveiling High-Temperature Superconducting Pairing Symmetry in Monolayer FeSe via Tunneling Andreev Reflection 

Main Etch Challenges in the GaN-based Devices

Study of N-Polar GaN Etching by a CH4/H2/Ar Plasma for µLED Applications

Investigating the Thermal Behavior of Atmospheric Pressure Plasma Jets on Different Surface Types

Controlling Nitrogen Product Distributions in Plasma Electrolytic Reactors for Microbial Growth

Particle-in-Cell Modeling of the Reverse Anode Sheath in Parallel-Plate Sub-Atmospheric Pressure Hydrogen Plasmas

Quantum Chemistry and Integrated Modeling for Understanding the Mechanisms of Selective and Cryogenic Atomic-Scale Etching 

Simulation of an Inductively Coupled Plasma with a Two-Dimensional Darwin Particle-in-Cell Code

Exploring the Impact of Mask Geometries on High Aspect Ratio Silicon Etching Using Cl₂/O₂ Plasmas

Modeling of Remote Inductively Coupled Plasmas and Comparison to Experiments

Modeling of E-H Transition in Inductively Coupled Plasmas 

Fully Kinetic Modeling of ICP Chambers Used for Plasma Processing

Comparative Analysis of Methods to Obtain EEDF in Plasma Simulations for Semiconductor Processing

"Single-Atom" Catalysis: Insights From Model Systems

Ligand-coordinated Supported Catalysts for Selective Hydrocarbon Chemistry

Ethanol Oxidation over Single-atom Model Rh/Fe₃O₄(001) Catalysts

Structure of Chemisorbed 1,3-Butadiene on the Cu(111) Surface and Its Influence on Selective Hydrogenation on a Pd/Cu(111) Single-Atom-Alloy

Well-Defined Cu-Delafossite Catalysts

Formation of Monodispersed Palladium–Tellurium Nanoclusters on WTe₂(001): The Role of Excess Tellurium and Water

Thermally Driven Chemical and Morphological Transition of Nb2O5 to NbO

Size and Support Effects on Propanol Electro-Oxidation Catalyzed by Sub-Nano, Size-Selected Ptn Clusters

Adsorption of Carboxylic Acids and Reaction-driven Morphological Changes on the Fe3O4(001) Surface

Oxidation of a Rh(111)/(322) Bisected Crystal

Flash Session

Hybrid Molecular Layer Deposition of Multi-Metal Alkoxide Resists for Electron Beam and Extreme Ultraviolet Lithography

High-Throughput MLD Screening of Photoresists for EUV Lithography via UV and E-Beam Exposure

Transforming Photo-Polymerized Organic Networks into Ceramics via Vapor Phase Infiltration (VPI)

Measuring the Coefficient of Thermal Expansion for Vapor Phase Infiltrated Ultra-low-k Dielectric Materials for Advanced Packaging

Machine Learning Predictions for Selecting Organic Small Molecules in Atomic Layer Processing

Physical Vapor Deposition of Metal Iodide Thin Films for Radiation Detections

Flipping the Switch on Tin Sulfide Deposition: From SnS to SnS₂

Homoepitaxial Growth of ZrB2 on a ZrB2(0001) Surface

Multilayered Films for High Hardness

Machine-Learned Relationships between Particle Flux, Kinetic Energy, and Experimental Conditions in Pulsed Laser Deposition