AVS2006 Plasma Science and Technology Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS1-MoM | Monday, November 13, 2006 8:00 AM | Etch for Advanced Interconnect I |
| PS2-MoM | Monday, November 13, 2006 8:00 AM | Advanced Gate Fabrication |
| PS-MoA | Monday, November 13, 2006 2:00 PM | Manufacturing and Scientific Challenges for Plasma Processing at 32 nm |
| PS1+MS+NM-TuM | Tuesday, November 14, 2006 8:00 AM | Plasma Patterning |
| PS2-TuM | Tuesday, November 14, 2006 8:00 AM | Plasma Surface Interactions I: Joint AVS-AIChE Session |
| PS1-TuA | Tuesday, November 14, 2006 2:00 PM | Emerging Plasma Applications |
| PS2-TuA | Tuesday, November 14, 2006 2:00 PM | Etch for Advanced Interconnect II |
| PS1-TuP | Tuesday, November 14, 2006 6:00 PM | Etching of High-K, Compound Semiconductors and Advanced Materials Poster Session |
| PS2-TuP | Tuesday, November 14, 2006 6:00 PM | Etching and Process Integration Poster Session |
| PS3-TuP | Tuesday, November 14, 2006 6:00 PM | Advanced Plasma Deposition Poster Session |
| PS1-WeM | Wednesday, November 15, 2006 8:00 AM | Plasma-Surface Interactions II |
| PS2+TF-WeM | Wednesday, November 15, 2006 8:00 AM | Plasma Deposition |
| PS1-WeA | Wednesday, November 15, 2006 2:00 PM | Plasma-Wall Interactions and Plasma Sources |
| PS2-WeA | Wednesday, November 15, 2006 2:00 PM | Atmospheric and Microplasmas |
| PS1+BI-ThM | Thursday, November 16, 2006 8:00 AM | Plasmas in Bioscience |
| PS2-ThM | Thursday, November 16, 2006 8:00 AM | Plasmas and Polymers |
| PS1-ThA | Thursday, November 16, 2006 2:00 PM | Plasma Processing for High-K/III-V’s and Smart Materials |
| PS2-ThA | Thursday, November 16, 2006 2:00 PM | Plasma Modeling |
| PS-ThP | Thursday, November 16, 2006 5:30 PM | High Pressure Discharges and Novel Diagnostics & Sources Poster Session |
| PS1-FrM | Friday, November 17, 2006 8:00 AM | Plasma-Surface Interactions III |
| PS2-FrM | Friday, November 17, 2006 8:00 AM | Diagnostics |